ETS IM-150
The IM-150 is a compact ion beam etching machine designed for precise material processing applications. It features a 150mm diameter ion source and supports ion source voltages ranging from 300 to 1000V. The system accommodates substrates up to 4 inches in diameter, with holder mechanisms that allow for rotation and inclination, ensuring uniform etching. Cooling options include water and gas cooling to maintain optimal processing temperatures. The machine’s manual wafer replacement and optional load lock system enhance operational efficiency.
IM-150 Ion Beam Etching Machine Specifications
| Feature | Details |
|---|---|
| Resolution | 5nm (30kV, SE Image) 8nm (30kV, BSE Image) |
| Magnification | 20x ~ 150,000x |
| Voltage | 1~30kV (1/5/10/15/20/30 - 6 Step) |
| Detector | Secondary Electron Image (SE) Backscattered Electron Image (BSE) *Multi Mode |
| Observation Mode | Standard Mode |
| Electron Gun | Pre-centered Tungsten Filament Cartridge |
| Lens System | Two-stage Electromagnetic Condenser Lens One-stage Electromagnetic Objective Lens |
| Stage System |
Stage Traverse: 5-axis Motor System (X, Y, R, T, Z) X, Y-axis: 40nm R-axis: 360º T-axis: 90º Z-axis: 0 ~ 35nm Beam Shift: Max.150µm |
| Max. Sample Size | 70nm (Diameter) x 30nm (Height) |
| Frame Memory |
High-Speed Mode (320 x 240): Preview Mode Low-Speed Mode (640 x 480) Photo Mode 1 (1280 x 960) Photo Mode 2 (2560 x 1920) Photo Mode 3 (5120 x 3840) |
| Data Display |
Magnification, Detector Type, Accelerating Voltage, Vacuum Mode, Logo (text), Date and Time, Micron Marker |
| Automation Functions | Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness |
| Image Format | BMP, JPG, PNG, TIFF |
| Vacuum System |
Vacuum Mode: High Vacuum System (Low-Option, TMP: 80L/min) Vacuum Pump: Rotary Pump + Turbo Molecular Pump (Full Automation System) |
| Main Unit Dimensions | 540mm (W) x 450mm (D) x 600mm (H) |
| Controller Unit Dimensions | 420mm (W) x 320mm (D) x 350mm (H) |
| Rotary Pump Dimensions | 400mm (W) x 160mm (D) x 340mm (H) |
| Installation Room Requirements |
Room Temperature: 15ºC ~ 30ºC Humidity: 70% or less Electric Power: Single phase 200 ~ 240 AC, 1KW, 50/60Hz |
