IM-10 SEM
The IM-10 Scanning Electron Microscope (SEM) is an entry-level model developed by ISP Co., Ltd., designed to deliver optimal functionality with essential specifications for various imaging and analysis applications.
Technical Specifications
| Resolution |
10.0 nm (Accelerating Voltage: 10 kV, High Vacuum) 20.0 nm (Accelerating Voltage: 5 kV, Low Vacuum) |
|---|---|
| Magnification | 30× ~ 50,000× (Magnification Ratio of Image) |
| Accelerating Voltage | 1 ~ 10 kV (1 / 5 / 10 – 3 Step) |
| Detector | BSE (Backscattered Electron Detector, High Sensitivity) |
| Electron Gun | Pre-centered Cartridge Type Tungsten Hairpin Filament |
| Stage System |
Stage Traverse: 3-Axis Motor System (X, Y, Z) X, Y Axis: 40 nm Z Axis: 0 ~ 35 nm Beam Shift: ±100 µm (WD = 8 mm) |
| Max. Sample Size | 40 mm (Diameter), 20 mm (Thickness) |
| Frame Memory |
High-Speed Mode: 320 × 240 (Preview) Low-Speed Mode: 640 × 480 Photo Mode 1: 1280 × 960 Photo Mode 2: 2560 × 1920 Photo Mode 3: 5120 × 3840 |
| Image Format | BMP, JPG, TIFF |
| Vacuum System |
Vacuum Mode: 1 Pump, 80 L/s Vacuum Pump: 1 Pump, 100 L/min (60 Hz) |
| Main Unit Dimensions | 540 mm (W) × 450 mm (D) × 600 mm (H) |
| Installation Room Requirements |
Room Temperature: 15°C ~ 30°C Humidity: 70% or less Electric Power: Single Phase 200 ~ 240 V AC, 1 kW, 50/60 Hz |
